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Product portfolio
| Modle |
L17 |
L20 |
L24 |
L30 |
L40 |
| Chamber #* |
6∼9 |
6∼9 |
6∼9 |
6∼9 |
11∼13 |
| Heater |
Optional |
Optional |
Optional |
Optional |
Optional |
| Pre-clean |
Optional |
Optional |
Optional |
Optional |
Optional |
Target Size*
(LxWxH):inch |
17"x5"
*0.5" |
20"x5"
*0.5" |
24"x5"
*0.5" |
30"x5"
*0.5" |
40"x5"
*0.5" |
Carrier Size*
(LxW):mm |
570x
420 |
570x
420 |
550x
600 |
700x
610 |
1200x
1000 |
* Custom design available.
General Configuration
Single-end type*
Single-end type*
Double-end type*
*Custom design available.
● Pumping System:
Low Vacuum: Dry Pump, Root's Pump + Booster Pump
High Vacuum: Cryo Pump, Turbo Pump, Diffusion Pump
● Options:
De-Gas
Plasma Clean
High Vacuum Buffer Chamber
● Process Capability
DC Sputter (Metal, ITO)
RF Sputter (Oxide)
MF sputter (reactive, SO2)
● Control System:
PLC + iPC
Adjustable carrier dynamic speed
Adjustable pass number of coatings
Adjustable gas type and flow rate
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