TOUCH PANEL

TUCANARFAMILY

• Application:
  • Low temperature invisible ITO
  • Anti-reflective coating
• Substrate:
  • Material: glass
  • Dimension:4" to G6
• Heating module:
  • Substrate temperature up to 380℃ Plasma treatment module(option);
  • Surface activation & cleaning
• Sputtering module:
  • Rotary or Planar magnetron
  • DC, MF, Pulse DC, RF superimposed DC
  • Thickness uniformity:<±5%
  • Uniformity of R&R <±3%