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SOLAR
SCORPIORFAMILY
- Application:
- CIGS or Si based thin film solar cell
- HIT solar cell
- Substrate:
- Material: glass
- Dimension:30x30 cm2 to G5
- Coating:
- Metal: Mo, Cr, AI
- Precursor: CuGa, In, CIG
- TCO: AZO, ITO, i-Zno, GZO
- Heating module:
- Substrate temperature up to 250℃
- Plasma treatment module (option):
- Surface activation & cleaning
- Sputtering module:
- Rotary or planar magnetron
- Deposition type: DC, MF, Pulse DC & RF
- Thickness uniformity:<±5%(±3% for option)
- Uniformity of R&R:<±3%
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LED LEPUSRFAMILY
- Application:
- Substrate:
- Material: ceramic
- Dimension: 4.3"x4.3",4.5"x4.5"
- Coating:
- Heating module:
- Substrate temperature up to 200℃
- Plasma treatment module:
- Surface activation & cleaning
- Double side treatment
- Sputtering module:
- Planar magnetron
- Deposition type: DC
- Double side coating
- Capacity of step coverage:>6 (aspect ratio)
- Thickness uniformity:<±5%
- Uniformity of R&R: <±3%
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